Rastertunnelmikroskop-Speichergerät.

摘要

A scanning tunneling microscope memory apparatus comprises first and second IC substrates (10, 12). First and second cantilevers (100, 200), which can be moved by piezoelectric elements, are arranged on first and second IC substrates (10, 12), respectively. Tunnel current probes (112) are provided on a end portion of the first cantilever (100), and a recording element (212) is provided on a end portion of the second cantilever (200). The first and second cantilevers (100, 200) are made to cross each other at a distance, such that the tunnel current probes (112) face the recording element (212). The first or second substrate (10, 12) includes a CCD circuit (14), a control circuit (16) for controlling the CCD circuit (14), cantilevers (100, 200), etc., and a drive circuit (18) having a preamplifier, a write circuit, a servo circuit, etc.