发明名称 Thin film ceramic multilayer wiring hybrid board
摘要 A ceramic thin film hybrid circuit board is provided by flattening the surface of a ceramic multi-layer interconnection substrate, forming capture pads on the flattened surface, filling spaces between the capture pads with an insulating layer composed of a glass material or an organic resin material, grinding the resultant surface until the capture pads are exposed to flatness, and laminating a plurality of thin film interconnection layers on the flattened surface. The ceramic thin film hybrid circuit board has an increased package density of mounted electronic parts such as LSIs and the like because failures of thin film interconnection layer generated owing to the roughness of the surface of the ceramic substrate, defects such as voids and the hollows produced with the capture pads are greatly reduced, and is very suitable for large scale electronic computers, in which the wiring length is reduced so as to reduce the signal delay.
申请公布号 US5396034(A) 申请公布日期 1995.03.07
申请号 US19930027346 申请日期 1993.03.08
申请人 HITACHI 发明人 FUJITA, TSUYOSHI;IWANAGA, SHOICHI;TANEI, HIRAYOSHI
分类号 H05K3/46;H01L21/48;H01L23/538;(IPC1-7):H05K1/00 主分类号 H05K3/46
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