| 摘要 |
PURPOSE: To reduce the number of parts of a static magnetic field generator, simplify the structure of a planar type biaxial electromagnetic actuator having two mobile plates intersecting each other at right angles and to reduce the manufacturing cost of the actuator. CONSTITUTION: In a planar type biaxial electromagnetic actuator 1 having two mobile plates intersecting each other at right angles, paired permanent magnets (static magnetic field generating means) 4 and 5 are arranged in a facing state along the diagonal line of a scanner main body 10 provided at the central part of an insulating substrate 2 so that a static magnetic field can be applied upon the main body 10. |
