| 发明名称 |
PERFLUOROPOLYMER COATED PELLICLES |
| 摘要 |
<p>Pellicles having films bearing at least one coating of perfluoropolymers as an anti-reflective surface, the perfluoropolymers being copolymerized units of tetrafluoroethylene and perfluro (alkyl vinyl) ether, and further comprising iodo moieties.</p> |
| 申请公布号 |
EP0478576(B1) |
申请公布日期 |
1996.12.04 |
| 申请号 |
EP19900907722 |
申请日期 |
1990.05.14 |
| 申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
ADAMS, JEROME, THOMAS;LOGOTHETIS, ANESTIS, LEONIDAS |
| 分类号 |
B32B27/30;C08J7/04;G03F1/62;H01L21/027;(IPC1-7):G03F1/14 |
主分类号 |
B32B27/30 |
| 代理机构 |
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| 地址 |
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