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发明名称
SEMICONDUCTOR TREATMENT APPARATUS
摘要
申请公布号
JPH09213648(A)
申请公布日期
1997.08.15
申请号
JP19960016121
申请日期
1996.01.31
申请人
SANYO ELECTRIC CO LTD
发明人
KOMORI KAZUHIKO
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/22;H01L21/31;H01L21/324;(IPC1-7):H01L21/22
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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