发明名称 METHOD FOR PRODUCING PLANAR TRENCHES
摘要 <p>Method for improving the topography over trench structures in which the provision of extra poly-semiconductor material e.g. polysilicon 20 or nitrate or oxide in the regions of the trench edges and, if necessary, the subsequent oxidation of the extra material prevents the occurrence of regions of high mechanical stress.</p>
申请公布号 WO1998043293(A1) 申请公布日期 1998.10.01
申请号 SE1998000528 申请日期 1998.03.23
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