| 摘要 |
The present invention discloses a MOS transistor which is capable of reducing an area of a diffusion layer of a source and drain, and is capable of reducing the number of manufacturing processes while enhancing flatness of a surface of the device. A selective silicon epitaxial layer is formed in an element region which is defined by an element isolation insulating layer formed in a silicon substrate. In the element isolation insulation layer, a polysilicon layer and a selective polysilicon layer connected to the selective silicon epitaxial layer are formed as a source and drain electrode. An LDD region and a source and drain region are formed in the selective silicon epitaxial layer, and a leading electrode for the source and drain region is formed in the source and drain electrode. The source and drain electrode can be formed by one photolithography process, and a margin between the gate electrode and the element isolation insulating layer can be reduced, whereby an area of a diffusion layer of the source and drain is reduced.
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