| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor having both high sensor sensitivity and excellent responsiveness. SOLUTION: In the hydrogen gas sensor 100, both reeds 11, 12 are formed on the substrate 10 surface, and both interdigital electrodes 20, 30 are formed on the substrate 10 surface so as to electrically connect both reeds 11, 12, and a sensitive layer 40 is formed so as to cover both interdigital electrodes 20, 30. The sensitive layer 40 is constituted of a sensitive layer material mainly composed of WO<SB>3</SB>/ZrO<SB>2</SB>which is a solid super-strong acid and including platinum which is a noble metal. COPYRIGHT: (C)2007,JPO&INPIT
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