| 摘要 |
PROBLEM TO BE SOLVED: To provide a nitrogen analyzer capable of highly precisely and continuously measuring the concentration of an impurity nitrogen contained in both feed argon and coarse argon with one analyzer. SOLUTION: The nitrogen analyzer for measuring the nitrogen based on the feed argon introduced into an argon tower in an air separation device 11 provided with the argon tower 12, and the coarse argon discharged from the argon tower is measured by the light intensity generated intrinsic light of nitrogen by discharge in the discharge tube 26 and the oxygen concentration of the sample gas introduced into the discharge tube, if the sample gas is the coarse argon, the dilution oxygen is added to the coarse argon so as to equate the oxygen concentration to the concentration of the feed argon and the introducing path 24 for adding the dilution oxygen to the coarse argon is provided. COPYRIGHT: (C)2007,JPO&INPIT
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