| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for dealing with a phenomenon in which an original shape reproduction image of an object 1 to be inspected obtained by a phase reproduction method is blurred and a pseudo image is generated since the object 1 is displaced within a captured image when a distance between an imaging means and the object 1 is varied. SOLUTION: The shape measurement method is a method for optically measuring a shape of the object 1, and includes: an illumination light irradiating step of irradiating the object 1 with an illumination light; a distance detecting step of detecting the distance between the object 1 and the imaging means; an imaging step of imaging a reflection light from the object 1; a displacement calculating step of calculating a displacement of the captured image in the in-plane direction based on a comparison with a previously-obtained reference image; a position correcting step of correcting a position of the imaging means by the corresponding displacement; an image obtaining step of obtaining an image used for measuring a shape; a distance adjusting step of adjusting the distance between the object 1 and the imaging means; an image group obtaining step of obtaining an image group by repeating the predetermined times of procedures; and an original shape reproducing step of implementing a calculation for reproducing the original shape image of the object 1 from the image group. COPYRIGHT: (C)2009,JPO&INPIT
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