| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for maintaining plane parallelism between a probe card and its probe substrate, which can satisfactorily maintain plane parallelism of tip parts of a probe group. SOLUTION: A probe card which comprises a circuit board which arranges the first connecting terminals at its undersurface, a probe substrate which arranges the second connecting terminals respectively corresponding to the first connecting terminals at its top surface as well as a plurality of probes at its undersurface, and a group of relaying connection pins which is attached to the first connecting terminal and is electrically connected to the second connecting terminal in contact with the second connecting terminal, wherein the first and second connecting terminals respectively corresponding to the plurality of relaying connection pins are arranged densely in the perimeter section and nondensely in the center section with respect to each plane of the circuit board and the probe substrate. COPYRIGHT: (C)2009,JPO&INPIT
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