| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray diffraction measurement apparatus capable of acquiring data necessary for a calculation of residual stress in a short time.SOLUTION: The intensity of diffraction X-ray generated when the X-ray is applied to a measuring object OB is detected by moving X-ray detection sensors 15 and 16. The X-ray detection sensors 15 and 16 are mounted on a stage 21 and move on a line perpendicularly crossing with an optical axis of the X ray by a stage moving mechanism 20. A controller 91 acquires the intensity of diffraction X ray detected by the X-ray detection sensors 15 and 16 at timing same as timing when a position detection circuit 72 detects the movement position of the stage 21, and acquires radius values of diffraction rings from the acquired intensity of the diffraction X ray and the movement position at two positions mutually symmetrical to the centers of the diffraction rings.SELECTED DRAWING: Figure 1 |
