ACCELEROMETER AND METHOD OF MAKING SAME

摘要

An accelerometer includes a mass, suspended by a beam, and associated conductive paths. Each conductive path is subjected to a magnetic field, such that, when a time varying signal is applied to the conductive paths, a characteristic resonant frequency is produced, and when the mass experiences an acceleration, a respective change in the resonant frequency is produced that may be interpreted as acceleration data. Embodiments include methods of manufacturing an accelerometer and systems and devices incorporating the accelerometer.

主权项

1. A method of manufacturing an accelerometer, comprising:
placing a magnet on a substrate; laminating a dielectric layer over the magnet; forming a conductive layer over the dielectric layer, the conductive layer including a mass and a conductive path overlying the magnet; removing a portion of the dielectric layer proximate the mass and the conductive path such that the mass is movable in response to acceleration of the accelerometer; and forming a dielectric layer over the mass while maintaining a space above the mass sufficiently clear such that the mass remains movable.