发明名称 |
Bipolar electrostatic chuck |
摘要 |
A bipolar electrostatic including a chuck main body having a mounting surface; an annular electrode member formed in an annular configuration wit a center opening and fixed onto the mounting surface of the chuck main body though an adhesive layer; an inner electrode member disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and fixed onto the mounting surface through the adhesive layer; and an outer electrode member disposed at a given clearance from the annular electrode member outside of the annular electrode member and fixed onto the mounting surface through the adhesive layer.
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申请公布号 |
US7567421(B2) |
申请公布日期 |
2009.07.28 |
申请号 |
US20050561159 |
申请日期 |
2005.12.16 |
申请人 |
CREATIVE TECHNOLOGY CORPORATION |
发明人 |
MIYASHITA KINYA |
分类号 |
H01L21/683;B23Q3/15;H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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