RETICLE TRANSPORT DEVICE, INSPECTION DEVICE AND RETICLE TRANSPORT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a reticle transport device capable of facilitating inspection of a reticle with the use of an inspection device.SOLUTION: A reticle transport device 10 for transporting a reticle for EUV lithography (EUVL) comprises: an inner pot take-out part 12 for taking out an inner pod stored in an outer pod; a reticle take-out part 13 for taking out the reticle stored in the inner pod; and an application part installation part for installing an application part capable of applying electric power, on an upper face or outer periphery of the reticle.SELECTED DRAWING: Figure 3