发明名称 Low-temperature formation of thin-film structures.
摘要 Methods for low-temperature formation of one or more thin-film semiconductor structures on a substrate are described wherein the method comprises the steps of: forming a (poly)silane layer over a substrate; transforming one or more parts of said (poly)silane layer in one or more thin-film solid-state semiconductor structures by exposing said one or more parts with light from an UV source.
申请公布号 NL2013715(B1) 申请公布日期 2016.10.04
申请号 NL20142013715 申请日期 2014.10.31
申请人 TECHNISCHE UNIVERSITEIT DELFT 发明人 ISHIHARA RYOICHI;MICHIEL VAN DER ZWAN;MIKI TRIFUNOVIC
分类号 H01L21/20 主分类号 H01L21/20
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