发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and manufacturing method therefor, capable of restraining warpage of a semiconductor device.SOLUTION: The semiconductor device includes: a semiconductor substrate; an insulation layer; and a buried region. The insulation layer is provided on the semiconductor substrate. The buried region is provided at the insulation layer and has a stress in the action direction opposite to that of the insulation layer. The insulation layer is provided with a wiring therein. The buried region is any region other than a formation region of the wiring in the insulation layer and is provided at the same layer as the wiring layer in the insulation layer.SELECTED DRAWING: Figure 1
申请公布号 JP2016207945(A) 申请公布日期 2016.12.08
申请号 JP20150090774 申请日期 2015.04.27
申请人 TOSHIBA CORP 发明人 TSUDA NAOHIRO
分类号 H01L21/768;H01L23/522;H01L27/146 主分类号 H01L21/768
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