Accurate object positioner using proportional EM actuator - has push=pull stages with laser measurement of displacement to supply data to control stages operating in MM range
摘要
A micropositioner, with a bandwidth of around 100 Hz, has rotationally symmetric armature (3) within a core (1). An airgap exists between the core and armature. Together with the windings (2,7) a pair of e.m. actuators is produced. At one end of the armature a mirror (10) is installed. The range of motion is in the millimetre range. A laser (12) is reflected off the mirror to provide measurement of the displacement and this provides feedback to regulating circuits (16,17) that adjust the excitation current to the coils. A digital processor (20) provides a reference value for the displacement. USE/ADVANTAGE - Provides high dynamic force over extremely small displacement range. Can dynamically correct position deviations caused by shaking of astronomical telescope.
申请公布号
DE4108688(A1)
申请公布日期
1992.09.17
申请号
DE19914108688
申请日期
1991.03.16
申请人
FA. CARL ZEISS, 7920 HEIDENHEIM, DE
发明人
WOHLFROM, JOSEF, 7082 OBERKOCHEN, DE;LOEFFLER, HORST, 7923 KOENIGSBRONN, DE