| 摘要 |
A method for removing impurities from quartz component of batch type heat processing apparatus is provided to remove metallic impurity emitting the metallic impurity from the quartz component by performing a bake processing of the quartz inner surface of the treatment basin. In a method for removing impurities from quartz component of batch type heat processing apparatus, a plurality of processed substrates is received into the treatment basin(2) in a vertical direction by a certain intervals. The treatment basin has the quartz inner surface exposed to the thermal process. A heater(23) heats up the processing inside of container. An exhaust system(21) discharges exhaust gas of the processing inside of container. A processing gas supply system(4) supplies a process gas to the treatment basin. A gas including the chlorine and steam is supplied to the treatment basin. A bake processing to the quartz inner surface is preformed by heating the quartz inner surface of the treatment basin. Through the bake processing, the metallic impurity is emitted from the quartz inner surface and is adhered to the dummy substrate. |
