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发明名称
摘要
申请公布号	JP2730201(B2)	申请公布日期	1998.03.25
申请号	JP19890204187	申请日期	1989.08.07
申请人	DENSOO KK	发明人	FUJII TETSUO
分类号	G01P15/12;H01L21/302;H01L21/3065;(IPC1-7):G01P15/12	主分类号	G01P15/12
代理机构		代理人
主权项
地址

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