发明名称 Method for manufacturing electron beam apparatus supporting member and electron beam apparatus
摘要 A method of manufacturing a supporting member for an electron beam apparatus including an airtight container, an electron source and the supporting member arranged in the airtight container, includes a step of heating and drawing a substrate of the supporting member. An electroconductive film is formed on a surface of the substrate in the heating and drawing step.
申请公布号 US6485345(B1) 申请公布日期 2002.11.26
申请号 US20000512266 申请日期 2000.02.24
申请人 CANON KABUSHIKI KAISHA 发明人 FUSHIMI MASAHIRO
分类号 H01J9/24;H01J9/02;H01J9/18;H01J29/02;H01J29/86;H01J31/12;(IPC1-7):H01J9/24 主分类号 H01J9/24
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