发明名称 MOUNTING STRUCTURE OF DIGITAL MICRO-MIRROR DEVICE, AND IMAGE EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To prevent occurrence of optical axis deviation of a digital micro-mirror device (DMD) in the structure which is used to mount the DMD onto an optical device. <P>SOLUTION: In the structure which is used to mount a DMD50 to the optical device, the DMD is adhesively fixed to a holding member at three fixed points 90a, 90b and 90c which are distributed within the surface that is perpendicular to the DMD optical axis. The three fixed points 90a, 90b and 90c are arranged so that the center of gravity of the triangle, in which the three points are apexes of the triangle, and a center point O of the utilization region of the DMD50 are approximately coincident with each other looking along the DMD optical axis direction. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006267239(A) 申请公布日期 2006.10.05
申请号 JP20050082184 申请日期 2005.03.22
申请人 FUJI PHOTO FILM CO LTD 发明人 KOROGI YUTAKA
分类号 G02B26/08;G03F7/20;H01L21/027 主分类号 G02B26/08
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