| 摘要 |
FIELD: nanotechnology, namely, devices, ensuring movement of object in a plane by two coordinates, possible use for moving samples, sample carriers, probe carriers and other elements in scanning probe microscopy. ^ SUBSTANCE: two-coordinate micro-positioner contains base, on which first motor is held for first coordinate, engaged by means of first lever and first flexible carrier to first moving carriage, while first lever is mounted on the base with usage of first flexible joint, and first moving carriage is mounted on the base by means of first flexible guides. On the first mobile carriage, second mobile carriage is positioned by means of second flexible guides. Second motor for second coordinate is present, with second lever, containing second flexible joint, and second flexible carrier. Second motor is held on base and engaged by second lever by means of second flexible carrier to second mobile carriage. Second lever is mounted on the base with usage of second flexible joint. Between the base and first and second flexible joints, inserts are positioned with temperature expansion coefficient different from temperature coefficients of the base, first and second mobile carriages, first and second lever, first and second flexible guides and motors. First and second position measuring strain sensors may be connected to first and second motors for first and second coordinates. ^ EFFECT: increased speed and precision of measurements. ^ 9 cl, 8 dwg
|
