| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputter ion pump capable of providing satisfactory pumping speeds even at low pressures, while having limited overall size and weight. SOLUTION: The sputter ion pump 1 has an improved magnet assembly comprising main magnets 9a, 9b disposed on both end parts of the pump cells of an anode, and auxiliary magnets 11; 11', 11" disposed on one side only of the pump cells, whereby the assembly exhibits an asymmetrical configuration. The sputter ion pump with the improved magnet assembly allows for attaining high pumping speeds even at low pressures while size, weight, and manufacturing cost of the pump itself are being suppressed. COPYRIGHT: (C)2008,JPO&INPIT
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