发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition giving a relief pattern with high sensitivity, and to form a cured relief pattern having chemical resistance in the pattern after curing on a substrate. <P>SOLUTION: The positive photosensitive resin composition comprises (A) 100 parts by mass of an alkali-soluble polyimide, (B) 1-100 parts by mass of an allyl group-containing compound and (C) 1-100 parts by mass of a compound which generates an acid under light. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008058756(A) 申请公布日期 2008.03.13
申请号 JP20060237295 申请日期 2006.09.01
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 KANEDA TAKAYUKI
分类号 G03F7/037;G03F7/004;G03F7/022;H01L21/027 主分类号 G03F7/037
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