| 摘要 |
FIELD: machine building.SUBSTANCE: invention relates to a device for radiation treatment, which is capable of fast and accurate processing of template surface. Device (10) for processing of template surface (W) with a beam (LB) has a source (32) for generating a beam (LB), device (12) for the beam (LB) movement, and several reflectors (14) located on the optical path of the beam (LB) between the device (12) for the beam movement and treated surface. Several reflectors (14) are inclined at a predetermined angle corresponding to the direction of incidence of the beam (LB), the beam (LB) moved by the device (12) for the beam movement passes almost vertically relative to another position of the treated surface.EFFECT: fast and accurate processing of template surface.14 cl, 17 dwg |
