发明名称 POLARIZATION MODULATION OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide an alternative method of manufacturing a polarization modulation optical element by which the local fluctuation of polarization distribution in an optical system is at least partially compensated, and to alternatively provide the polarization modulation element. <P>SOLUTION: The method of manufacturing the polarization modulation element is characterized in that the element develops a retardation distribution between the orthogonal states of polarization in the light passing through the element by a stress-induced double refraction, the method includes a step to connect a first component and a second component, a non-flat face of the first component on which a profile having a prescribed height is given is connected to the flat surface of the second component, a mechanical stress causing the stress-induced double refraction is generated in the polarization modulation element which is deformed as described above. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007316634(A) 申请公布日期 2007.12.06
申请号 JP20070121775 申请日期 2007.05.02
申请人 CARL ZEISS SMT AG 发明人 KRAEHMER DANIEL;MUELLER RALF
分类号 G02B5/30;H01L21/027 主分类号 G02B5/30
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