| 摘要 |
PROBLEM TO BE SOLVED: To provide a control device for a vacuum pump capable of preventing dew condensation at starting of the pump, and capable of improving usability.SOLUTION: A control device for a vacuum pump includes a power supply device for driving the vacuum pump, a flow passage of a refrigerant for cooling the power supply device, a refrigerant limit device for limiting inflow of the refrigerant to the flow passage, and a refrigerant control section for limiting inflow of the refrigerant to the flow passage by the refrigerant limit device for prescribed time after starting of supply of electric power to the power supply device. The refrigerant limit device is a three-way valve switched between a supply position allowing the refrigerant to flow into the flow passage and a bypass position shutting inflow of the refrigerant to the flow passage and allowing the refrigerant to flow into a bypass passage, and the refrigerant control section switches the three-way valve to the bypass position for the prescribed time after starting of supply of the electric power to the power supply device, and switches the three-way valve to the supply position when a condition that there is not sign of dew condensation is satisfied after the prescribed time.SELECTED DRAWING: Figure 5 |
