SEMICONDUCTOR DEVICE, MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE, AND NONTRANSITORY COMPUTER READABLE MEDIUM STORING A PATTERN GENERATING PROGRAM

摘要

According to one embodiment, a semiconductor device includes a stacked body of N (N is an integer greater than or equal to 2) layers stacked on a semiconductor substrate and openings different in depth surrounded by the stacked body and separated from each other. According to the present invention, the semiconductor device can be manufactured by a small number of processes.