Centimeter-scale high resolution metrology of entire CVD grown graphene sheets

摘要

A method for quick and easy identification of layer thickness and uniformity of entire large-area graphene samples on arbitrary substrates utilizing fluorescence quenching microscopy in which a polymer mixed with fluorescent dye is applied onto the graphene, then viewing the sample under a fluorescence microscope. A large-scale, high-resolution montage image of the sample is obtained for histogram-based segmentation based on contrast relative to the substrates.

主权项

1. A method for analyzing graphene comprising
performing fluorescence quenching microscopy on a graphene sample to identify graphene layers on arbitrary substrates, the fluorescence quenching microscopy includes:
applying a polymer mixed with fluorescent dye onto the graphene then viewing the sample under a fluorescence microscope, wherein the polymer and dye mixture is applied by spin-coating a solution of the polymer and dye mixture onto the graphene sample, wherein the solution include toluene; and wherein the graphene layers are identified by performing a histogram-based segmentation based on contrast relative to the substrates.