发明名称 SURFACE POLISHING DEVICE HAVING SUN GEAR RAISING AND LOWERING MECHANISM
摘要 PURPOSE:To move a sun gear vertically by simple operation to change a meshing position with a carrier. CONSTITUTION:A holding member 11 to hold a sun gear 4 is installed on a sun gear driving shaft 4a so as to be movable freely only in the axis direction. A propelling member 13 to move the holding member vertically by rotation by screw-fitting to the holding member is fitted so as to have a degree of freedom only in the rotating direction, and the propelling member 13 is operated in rotation through a transmission mechanism 22 composed of a driving bevel gear 21 on the tip of a handle and a driven bevel gear 19 on the upper end of the propelling member 13 by the handle 18 mountable and demountable freely through an inserting hole 25 from outside of a driver 8 on the upper end of an upper surface plate driving shaft 1a.
申请公布号 JPH06339855(A) 申请公布日期 1994.12.13
申请号 JP19930152809 申请日期 1993.05.31
申请人 SPEEDFAM CO LTD 发明人 ARAI HATSUYUKI
分类号 B24B37/00;B24B37/27;B24B37/28 主分类号 B24B37/00
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