METHOD OF FORMING FILM PATTERN, DEVICE, METHOD OF MANUFACTURING THE SAME, ELECTRO-OPTICAL APPARATUS, AND ELECTRONIC APPARATUS

摘要

A method of forming a film pattern by disposing a functional liquid on a substrate, includes: forming banks on the substrate; disposing the functional liquid in areas partitioned by the banks; and drying the functional liquid disposed on the substrate, wherein the forming of the banks including: forming a plurality of layers made of inorganic materials; patterning a plurality of the layers by using an organic mask; and removing the organic mask.