METHOD AND APPARATUS FOR THE PRODUCTION OF A STRUCTURE BY FOCUSED LASER RADIATION ON A PHOTOSENSITIVELY COATED SUBSTRATE

摘要

This invention relates to a method for writing on a photosensitive surface a pattern described in input data by scanning at least one modulated laser beam in parallel scan lines while moving along scan stripes in a direction perpendicular to the scan lines. The method comprising the steps of dividing said input data into partially overlapping stripe pattern data corresponding to scan stripes having stripe overlap regions, providing a predetermined exposure blend function along the scan line, said blend function starting and ending with a 0 % value and further having a 100 % value near the center of the scan line, and modulating the laser beam with the product of the exposure blend function and the stripe pattern data. The invention also includes an apparatus for writting patterns according to the above mentioned method.