| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a permanent pattern by which a permanent pattern can be efficiently formed with high definition by averaging influences of variance in the exposure light energy due to pattern distortion and suppressing distortion in an image projected onto a photosensitive layer. <P>SOLUTION: After a photosensitive layer is formed on the surface of a substrate by using a photosensitive composition, the photosensitive layer is exposed by relatively moving an exposure head in a scanning direction and developed. The exposure head includes a light irradiating means and a light modulating means and is disposed in such a manner that the line direction of drawing parts in the head makes a predetermined set inclination angle θ with respect to the scanning direction. The drawing parts in the exposure head are controlled in such a manner that drawing parts to be used for N-time multiple exposure (N is a natural number of 2 or more) are designated by a designating means of drawing parts for use, and that only the designated drawing parts participate in the exposure process by a drawing part controlling means. <P>COPYRIGHT: (C)2007,JPO&INPIT |
