| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum robot capable of changing the layout of a working stage arranged in a vacuum chamber in a compact manner. SOLUTION: In the vacuum robot 10, four driving shafts are concentrically arranged in a stand 11. A first driving shaft 21 turnably connects a first arm 12 to the stand 11; a second driving shaft 22 turnably connects a second arm 13 to the first arm 12; a third driving shaft 23 turnably connects a first hand 14 to the second arm 13; and a fourth driving shaft 24 turnably connects a second hand 15 to the second arm, respectively. The first driving shaft 21, the second driving shaft 22, the third driving shaft 23, and the fourth driving shaft 24 are driven by driving sources independent from each other, and a magnetic fluid seal 51 is attached to each of them. COPYRIGHT: (C)2007,JPO&INPIT
|
