| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask member that allows execution of film-formation according to an opening pattern of the mask member, even when each beam part is arranged between opening parts, and to provide an organic EL device manufacturing method that uses the same. SOLUTION: The mask 10 used for mask vapor deposition is provided with the mask member 12, formed with the opening parts 12a and each beam part 15 arranged in between the opening parts 12a on the lower-face side of the mask member 12. Each opening part 12a has a wide opening area on the side of a film-forming material supply source and a narrow opening area on the side of a substrate to be processed. The cross-sectional shape when the beam part 15 is cut in a direction orthogonal to the longitudinal direction is substantially an inverted triangle, whose bottom side is directed to the side of the mask member 12 and whose top part is directed to the side of the film-forming material supply source. The beam part 15 having such a configuration can be constituted by a bar-like or a pipe-like object. COPYRIGHT: (C)2008,JPO&INPIT
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