| 摘要 |
PROBLEM TO BE SOLVED: To certainly perform secondary ion mass analysis of high precision by efficiently removing an extraneous matter becoming the contamination component of the leading end part of a secondary ion detection means. SOLUTION: A gas is introduced into a vacuum chamber 10 by a gas introducing means 20 and the vicinity of a draw-out electrode 4 is locally regulated to a low vacuum state. In this state, plasma 11 is produced by glow discharge by applying predetermined voltage to the draw electrode 4 by a plasma producing mechanism 30 and the draw electrode 4 is exposed to the plasma 11 to be cleaned. COPYRIGHT: (C)2008,JPO&INPIT
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