INFRARED SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an infrared sensor capable of achieving high sensitivity and high response speed and provide its manufacturing method. SOLUTION: In the infrared sensor, a temperature detection part 3 for absorbing infrared radiation and detecting temperature changes due to the absorption is supported at a base substrate 1 via a heat insulating part 2 on the side of one surface of the base substrate 1. The heat insulating part 2 includes a holding part 2a for holding the temperature detection part 3 and two leg parts 2b connecting the holding part 2a to the base substrate 1. The leg parts 2b are each constituted of a second porous material layer 21b made of a porous material (porous silica) having an electrical insulation property; a wiring layer 4 formed on the second porous material layer 21b and electrically connected to the temperature detection part 3; and a second protective layer 22b made of an insulating material (SiO2) and formed below the second porous material layer 21b for protecting the lower surface of the second porous material layer 21b. COPYRIGHT: (C)2008,JPO&INPIT