| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus that secures smooth motion of a probe for inspection, and secures the stability of an electric signal as a result of inspection by preventing instability of electric resistance by contact of a probe section. SOLUTION: The inspection apparatus 100 includes a probe 1 having a probe section 1a coming into contact with a measuring object 51, a guide part support 3 for slidably holding the probe 1 in a first guide part 5, a connection member 2 connected with the probe, and a cable 4 connected with the connection member 2. The inspection apparatus 100 inspects the electrical characteristic of the measuring object 51 by measuring an electrical characteristic value of the measuring object 51 via the probe 1. The inspection apparatus 100 further includes a sliding member 8 slidably held by a second guide part 7 disposed in the guide part support 3. The sliding member is connected with the connection member. COPYRIGHT: (C)2008,JPO&INPIT
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