| 发明名称 |
METHOD OF CLEANING ION SOURCE, AND CORRESPONDING APPARATUS/SYSTEM |
| 摘要 |
A method and/or system for cleaning an ion source is/are provided. In certai n embodiments of this invention, both the anode and cathode of the ion source are negatively biased during at least part of a cleaning mode. Ions generate d are directed toward the anode and/or cathode in order to remove undesirable build-ups from the same during cleaning.
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| 申请公布号 |
CA2499235(C) |
申请公布日期 |
2009.01.27 |
| 申请号 |
CA20032499235 |
申请日期 |
2003.10.20 |
| 申请人 |
GUARDIAN INDUSTRIES CORP.;ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
FRATI, MAXIMO;LUTEN, HENRY A.;VEERASAMY, VIJAYEN S.;SHAW, DENISE R. |
| 分类号 |
H01J27/02;H01J27/08;H01J27/14;H01J37/08;H01J37/32 |
主分类号 |
H01J27/02 |
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