发明名称 WORK ROTATION DRIVE UNIT AND EXPOSURE DEVICE FOR OPTICAL DISK MASTER DISK
摘要 <P>PROBLEM TO BE SOLVED: To remove a work from a turntable and to efficiently execute stable drawing processing of an optical disk master disk without losing the weight balance of the turntable, without adding any redundant mounting arm and without interfering with a clamp pin. <P>SOLUTION: A work rotation drive unit of this invention includes the turntable which is rotated while a work is mounted thereon, a spindle shaft which is rotatably supported via a spindle housing and has one end fixed to the turntable, a motor for rotary-driving the spindle shaft, a clamping means for positioning and holding the work in the turntable, and a work transfer means which is disposed on the rotary axis of the turntable, the spindle shaft and the motor, and vertically moved up and down with respect to the turntable to remove the work from the turntable. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006286131(A) 申请公布日期 2006.10.19
申请号 JP20050107121 申请日期 2005.04.04
申请人 RICOH CO LTD 发明人 MURAYAMA NOBORU
分类号 G11B7/26;G03F7/20;H01J37/20;H01L21/027 主分类号 G11B7/26
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