| 发明名称 |
GYRO SENSOR, ELECTRONIC DEVICE, MOBILE APPARATUS, AND MANUFACTURING METHOD OF GYRO SENSOR |
| 摘要 |
A gyro sensor includes a substrate, an oscillation member, fixed driving electrodes and a movable driving electrode that oscillated the oscillation member, fixed detection electrodes and a movable detection electrode that id detected a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member, a bias voltage application unit that applies a bias voltage to the oscillation member, and a storage unit, and the bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit. |
| 申请公布号 |
US2016258753(A1) |
申请公布日期 |
2016.09.08 |
| 申请号 |
US201615016454 |
申请日期 |
2016.02.05 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
KANEMOTO Kei |
| 分类号 |
G01C19/56;G01C25/00 |
主分类号 |
G01C19/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A gyro sensor comprising:
a substrate; an oscillation member; a fixed driving electrode that is fixed to the substrate and oscillates the oscillation member; a movable driving electrode that is connected to the oscillation member and is oscillated the oscillation member; a fixed detection electrode that is fixed to the substrate and detects a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member; a movable detection electrode that is connected to the oscillation member and is detected a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member; a bias voltage application unit that applies a bias voltage to the oscillation member; and a storage unit, wherein the bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit. |
| 地址 |
Tokyo JP |
