| 摘要 |
PURPOSE:To increase the rate of development by incorporating a diazonium salt having a specified structure into an alkali-soluble polymer such as cresol resin. CONSTITUTION:This positive type photosensitive compsn. contains a diazonium salt represented by the formula and an alkali-soluble polymer. In the formula, R<1> is alkyl, substd. alkyl, aryl or substd. aryl, R<2> is H, alkyl, substd. alkyl, aryl, substd. aryl or halogen, A is an org. group, X<1-> is a counter anion, (n) is an integer of 1-4, (m) is an integer of 1-3, n+m=4 and (l) is an integer of 2-10. |
