| 摘要 |
<p>PURPOSE:To make construction compact and enable high-precision positioning by arranging two or more members on the same plane, and jointing the aforesaid members to each other via a elastic hinges for the constitution of two-stage constitution. CONSTITUTION:A fixed support system 1 and the first X-stage 2a are jointed to each other in a Y-direction via an X-elastic hinge 7a having flexibility in an X-direction, thereby constituting the first stage. Furthermore, the second X-stage 2b is fixed and supported onto the first X-stage 2a, and the second X-stage 2b and a Y-stage 3 are jointed to each other in the X-direction via a Y-elastic hinge 7b having flexibility in a Y-direction. The aforesaid Y-stage 3 and a thetaZ-stage 4 are jointed to each other via a thetaZ-elastic hinge 7c having flexibility in a circumferential direction, thereby constituting the second stage. According to the aforesaid construction, a compact and high-precision stage device can be obtained.</p> |
