Surface acoustic wave device incorporating single crystal LiNbO3

摘要

A surface acoustic wave device includes at least diamond, a single crystal LiNbO3 layer formed on the diamond, and an interdigital transducer formed in contact with the LiNbO3 layer and uses a surface acoustic wave (wavelength: lambda n mu m) in an nth-order mode (n=1 or 2). When the thickness of the LiNbO3 layer is t1 ( mu m), kh1=2 pi (t1/ lambda n) and the cut orientation ( theta , PHI , and psi represented by an Eulerian angle representation) with respect to the crystallographic fundamental coordinate system of the LiNbO3 layer are selected from values within specific ranges. Consequently, a surface acoustic wave device which increases the propagation velocity (V) of a surface acoustic wave and improves the electromechanical coupling coefficient (K2) is realized.