发明名称 |
EPITAXY BOAT AND METHOD FOR LIQUID PHASE EPITAXIAL DEPOSIT OF CDHGTE |
摘要 |
The invention concerns an epitaxy boat for the liquid phase epitaxial deposit of a CdHgTe layer on a heterosubstrate without any risk of dissolving the heterosubstrate in the epitaxy solution. Said boat comprises two horizontal slides mutually offset such that the tellurium solution is brought above a selected zone of the heterosubstrate. The invention also concerns a method for depositing a CdHgTe layer on a heterosubstrate using said boat. The invention is applicable to the production of infrared radiation detectors. |
申请公布号 |
EP0983395(A1) |
申请公布日期 |
2000.03.08 |
申请号 |
EP19980925759 |
申请日期 |
1998.05.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
PELLICIARI, BERNARD;POLGE, BERNARD |
分类号 |
C30B19/04;C30B19/06 |
主分类号 |
C30B19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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