发明名称 Method of manufacturing liquid discharge head
摘要 The method of manufacturing a recording head has a flow path wall forming step of forming flow path walls on a substrate having energy generating elements formed thereon, an imbedded material depositing step of depositing an imbedded material between the flow path walls and on a top of each flow path wall, a flattening step of polishing a top of the deposited imbedded material, until the top of the flow path wall is exposed, and a step of forming an orifice plate on the tops of the polished imbedded material and the exposed flow path wall. In the step of forming the flow path walls, patterning of a close contact property improvement layer is simultaneously performed to improve a close contact property between the flow path wall and the substrate.
申请公布号 US7300596(B2) 申请公布日期 2007.11.27
申请号 US20060481796 申请日期 2006.07.07
申请人 CANON KABUSHIKI KAISHA 发明人 MURAYAMA HIROYUKI;KOYAMA SHUJI;TAGAWA YOSHINORI;FUJII KENJI;OHSUMI MASAKI;URAYAMA YOSHINOBU;YAMAMURO JUN;TAKAHASHI TSUYOSHI;WATANABE MASAHISA
分类号 B41J2/05;H01L21/00 主分类号 B41J2/05
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