| 发明名称 |
Apparatus and method for determining a thickness of a deposited material |
| 摘要 |
Method and apparatus for determining a thickness of a deposited material. Energy is passed through the deposited material, wherein some of the energy is transmitted. The transmitted energy is received, and the received energy is used to determine a thickness of the deposited material.
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| 申请公布号 |
US7301149(B2) |
申请公布日期 |
2007.11.27 |
| 申请号 |
US20040839967 |
申请日期 |
2004.05.06 |
| 申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
MACKIN THOMAS J.;SAGER CHAD R. |
| 分类号 |
G01N21/59;C23C14/54;G01B11/02;G01B11/06;G01N21/86 |
主分类号 |
G01N21/59 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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