Pattern formation

摘要

A precursor for preparing a resist pattern by heat mode imaging, the precursor comprising a heat sensitive composition, the solubility of which in an aqueous developer is arranged to increase in heated areas, and a means for increasing the resistance of non-heated areas of the heat sensitive composition to dissolution in an aqueous developer (hereinafter the "developer resistance means"), wherein said developer resistance means comprises one or more compounds which include a poly(alkylene oxide) unit.