| 摘要 |
PROBLEM TO BE SOLVED: To provide a means by which a high-purity borazine compound can be produced in high yield with little amount of a metal atom such as sodium to improve the performance of LSI or the like. SOLUTION: The method for producing the borazine compound includes a step for synthesizing the borazine compound by reacting (I) a metal borohydride (with the proviso that the metal atom is the one except a lithium atom, a sodium atom or a potassium atom) with (II) an amine salt represented by the formula: (RNH<SB>3</SB>)<SB>n</SB>X (wherein, R is a hydrogen atom, an alkyl group or a cycloalkyl group; X is a sulfate group or a halogen atom; and n is 1 or 2) in (III) a solvent. COPYRIGHT: (C)2008,JPO&INPIT
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